| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To perform thermal dissociation of gas more efficiently by compounding a heater for rising temperature and a filament for thermal dissociation. <P>SOLUTION: A heater for rising temperature comprises a heat coil formed by winding a heater wire of a metal having high melting point, and lead parts on both sides continuous to the heat coil. A filament for thermal dissociation consists of a thermion emission part comprising a filament of a metal having high melting point and generating thermions with a diameter smaller than that of the heater wire, and leads on both sides continuous to the thermion emission part. The thermion emission part of the filament for thermal dissociation is applied, in noncontact state, to the outer periphery of the heat coil thus compounding the heater for rising temperature and the filament for thermal dissociation. <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |
