| 摘要 |
PROBLEM TO BE SOLVED: To continuously and appropriately control the additive amount of hydrogen peroxide while suppressing the cost. SOLUTION: This apparatus 1 of manufacturing pure water or ultrapure water includes a hydrogen peroxide addition apparatus 11 for adding hydrogen peroxide to treated water at a predetermined injection position 26 on a header 24 in which the treated water containing an organic matter flows, an ultraviolet irradiation apparatus (UV) 6 that is disposed on the header and irradiates the treated water with ultraviolet rays, an ion exchange apparatus (CP) 8 that is disposed on the header and through which the treated water flows, a hydrogen peroxide concentration measuring device 14 disposed via a dividing pipe for dividing the treated water from the section between the injection position of the header and the ion exchange apparatus, and a controlling means 25 for controlling the amount of the hydrogen peroxide added by the hydrogen peroxide addition apparatus. The hydrogen peroxide concentration measuring device 14 brings the treated water into contact with a catalytic metal carrier carrying platinum group metal, decomposes the hydrogen peroxide to generate water and oxygen, and measures the dissolved oxygen concentration of the treated water on the outlet side of the hydrogen peroxide decomposition apparatus. COPYRIGHT: (C)2012,JPO&INPIT |
