Piezoelectric thin film element and method of manufacturing the same, droplet discharge head and inkjet recording device using the piezoelectric thin film element

摘要

A piezoelectric thin film element includes a vibration plate, a lower electrode provided on the vibration plate and made of a conductive oxide, a piezoelectric thin film provided on the lower electrode and made of a polycrystalline substance, and an upper electrode provided on the piezoelectric thin film, wherein the lower electrode includes a titanium oxide film formed on the vibration plate, a platinum film formed on the titanium oxide film, and a conductive oxide film formed on the platinum film and, the platinum film and the conductive oxide film being a solid film with no holes.

主权项

1. A piezoelectric thin film element, comprising:
a vibration plate; a titanium oxide film formed of TiO2 on the vibration plate; a lower electrode provided on the titanium oxide film of TiO2; a piezoelectric thin film provided on the lower electrode and made of a polycrystalline substance; an upper electrode provided on the piezoelectric thin film; a protective insulating layer comprising a through hole and provided on at least a portion of each of the lower electrode, the piezoelectric thin film, and the upper electrode; and a wiring electrode having a portion thereof provided in the through hole of the protective insulating layer, wherein the lower electrode includes
a platinum film formed on the titanium oxide film, anda conductive oxide film formed on the platinum film, and wherein the portion of the wiring electrode is connected to the conductive oxide film of the lower electrode through the through hole.