Lithographic apparatus

摘要

A lithographic apparatus includes an illumination system configured to condition a radiation beam; a support constructed to support a patterning device, the device being capable of imparting the beam with a pattern in its cross-section to form a patterned radiation beam; a substrate table constructed to hold a substrate; a stage system to position the table relative to a reference structure; a projection system configured to project the patterned radiation beam onto a target portion of the substrate; an optical measurement system including a sensor part and an optical part, the optical part being configured to optically interact with the patterned radiation beam and to transmit a result from the interaction as output to the sensor part, wherein the optical part is arranged on the table, and the sensor part is arranged on the stage system or the reference structure.

主权项

1. A lithographic apparatus, comprising:
a support constructed to support a patterning device, the patterning device being capable of imparting a radiation beam with a pattern in its cross-section to form a patterned radiation beam; a substrate table constructed to hold a substrate; a stage system to position the substrate table relative to a reference structure; a projection system configured to project the patterned radiation beam onto a target portion of the substrate; an optical measurement system comprising a sensor part and an optical part, the optical part being configured to optically interact with a portion of the patterned radiation beam and to transmit a result from the interaction as output to the sensor part, wherein the optical part is arranged on the substrate table so that said portion of the patterned radiation beam is receivable by the optical part and another portion of said patterned radiation beam is receivable by the substrate, and wherein the sensor part is arranged on the stage system, and wherein said substrate table is moveable relative to the stage system during positioning of the substrate table relative to the reference structure so that said optical part and sensor part are moveable relative to each other during said positioning.