Semiconductor devices and methods of fabricating the same

摘要

A method of fabricating a semiconductor device includes providing a substrate including a first region and a second region, forming a first trench having a first width in the first region and a second trench having a second width in the second region, and the second width is greater than the first width. The method also includes forming a first insulation layer in the first and second trenches, removing the first insulation layer in the second trench to form a first insulation pattern that includes the first insulation layer remaining in the first trench, forming on the substrate a second insulation layer that fills the second trench, and the second insulation layer includes a different material from the first insulation layer.

主权项

1. A method of fabricating a semiconductor device, the method comprising:
providing a substrate including a first region and a second region; forming a first trench having a first width in the first region and a second trench having a second width in the second region, the second width being greater than the first width; forming a first insulation layer in the first and second trenches, wherein the first insulation layer is formed to fill the first trench and to provide an empty space surrounded by the first insulation layer in the second trench; removing the first insulation layer in the second trench to form a first insulation pattern that includes the first insulation layer remaining in the first trench; and forming on the substrate a second insulation layer that fills the second trench, the second insulation layer including a different material from the first insulation layer.