Structure having plural conductive regions and process for production thereof

摘要

A structure having a plurality of conductive regions insulated electrically from each other comprises a movable piece supported movably above the upper face of the conductive region, the movable piece having an electrode in opposition to the conductive region, the structure being constructed to be capable of emitting and receiving electric signals through the lower face of the conductive region, the plural conductive regions being insulated by sequentially connected oxidized regions formed from an oxide of a material having through-holes or grooves.

主权项

1. A structure having a substrate including a plurality of conductive regions insulated electrically from each other, comprising
a movable piece supported movably above a first face of the conductive region, the movable piece having an electrode in opposition to the conductive region, the structure being constructed to be capable of emitting and receiving electric signals through a second face opposite from the first face of the conductive region, the plural conductive regions being insulated by oxidized regions that are formed from a thermal oxide of a material of the substrate and that are placed so as to surround each of through-holes formed in the substrate, wherein of through-holes between the conductive regions, in a region between through-holes adjacent to each other, thermal oxides formed so as to surround each of a periphery of the through-holes adjacent to each other are connected from a side of the first face of the substrate to a side of the second face.