发明名称 MICROWAVE HEAT TREATMENT DEVICE AND METHOD
摘要 <p>PROBLEM TO BE SOLVED: To provide a microwave heat treatment device and method capable of performing uniform and efficient heat treatment to a treated body.SOLUTION: A microwave heat treatment device 1 comprises a phase adjusting part 7 for changing a phase of a standing wave of a microwave introduced into a treatment container 2 by a microwave introduction device 3. The phase adjusting part 7 has a recessed part recessed deeper than an inner wall surface 13b of a bottom part 13 of the treatment container 2 with reference to the inner wall surface 13b. The phase adjusting part 7 is formed by the bottom part 13, and an anchor plate 27 attached to a lower surface of the bottom part 13 from the outside of the treatment container 2. A microwave enters into the recessed part of the phase adjusting part 7 surrounded by a metal wall, and then reflected, and thereby, the phase of the standing wave in the treatment container 2 is changed.</p>
申请公布号 JP2015002130(A) 申请公布日期 2015.01.05
申请号 JP20130127100 申请日期 2013.06.18
申请人 TOKYO ELECTRON LTD 发明人 KADOTA TAICHI;SHIMOMURA KOJI;HONG SEOKHYOUNG;MIYAGAWA YOSHIHIRO;YAMASHITA JUN;IKEDA TARO;MOTOMURA HIROKI
分类号 H05B6/74;F27D11/12;H01L21/268 主分类号 H05B6/74
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