| 摘要 |
PROBLEM TO BE SOLVED: To provide an electric charge particle beam apparatus which, when extracting a reference image and a sample image to be compared from an acquired image to perform comparison inspection, can perform the comparison inspection at high accuracy even for a pattern having a collapsed symmetric property. ! SOLUTION: An electric charge particle beam apparatus includes an arithmetic device for performing comparison inspection on the basis of an image signal. The electric charge particle beam apparatus extracts a first partial region and a second partial region from an image, calculates a correlation value by relatively rotating a partial image in the first region and a partial image in the second region, and performs a deference image arithmetic between the partial image in the first region and the partial image in the second region at a relative angle between the partial image in the first region and the partial image in the second region in which the correlation value satisfies a predetermin |
