| 摘要 |
PROBLEM TO BE SOLVED: To prevent the occurrence of a surface defect of a film by accurately recognizing the amount of deposits on a wall surface of an oven to clean the wall surface at a proper timing. ! SOLUTION: An instrument for measuring the amount of deposits on a wall surface includes a resistivity meter 11 which is brought into contact with deposits adhering to a wall surface in an oven 1 to directly detect the amount of the deposits, and a resistivity meter moving mechanism (cylinder 14) which moves a sensing part 11a of the resistivity meter in such directions that the sensing part 11a comes into contact with the wall surface and is separated from the wall surface. When the resistivity meter is made resident in the oven, it is preferable that a resistivity meter protection member (a storage box 12 and an opening/closing door 12a) is additionally provided which covers the resistivity meter to protect it from an atmosphere in the oven, and releases the protection when the resistivity meter is moved |
