发明名称 EVAPORATION SOURCE AND APPARATUS FOR DEPOSITING HAVING THE SAME
摘要 Disclosed are an evaporation source and a depositing apparatus including the same, capable of preventing damage on a combination part. According to one aspect of the present invention, provided is the evaporation source which includes a crucible which is extended from the upper side to the outside, includes a first flange in which a plurality of first through holes are separately formed, receives an evaporation material, and discharges an evaporation particle by heating, a nozzle part which is extended from the lower side to the outside, includes a second flange which includes a plurality of through holes to face the first through holes, and sprays the evaporation particle on the substrate, a loop-shaped pressing ring which is arranged on the rear of the second flange and includes a plurality of female screw holes which are separately formed, and a fixing bolt which is screwed to the female screw hole via the first through hole and the second through hole.
申请公布号 KR20150000327(A) 申请公布日期 2015.01.02
申请号 KR20130072648 申请日期 2013.06.24
申请人 SUNIC SYSTEM. LTD. 发明人 KANG, HYO SUN;HWANG, IN HO
分类号 H01L51/56;H05B33/10 主分类号 H01L51/56
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