发明名称 |
COMBO BIO AND TEMPERATURE DISPOSABLE SENSOR ON FLEXIBLE FOIL |
摘要 |
A bio-fluid sensor is formed by depositing polyimide on a glass substrate. Gold and platinum are deposited on the polyimide and patterned to form fluid sensing electrodes, signal traces, and a temperature sensor. The fluid sensor is then fixed to a flexible tape and peeled off of the glass substrate. |
申请公布号 |
US2015001075(A1) |
申请公布日期 |
2015.01.01 |
申请号 |
US201313929525 |
申请日期 |
2013.06.27 |
申请人 |
STMicroelectronics Pte Ltd. |
发明人 |
Le Neel Olivier;Cherian Suman;Leung Calvin;Shankar Ravi;Loh Tien Choy;Kam Shian Yeu |
分类号 |
G01N27/416;H01L35/34 |
主分类号 |
G01N27/416 |
代理机构 |
|
代理人 |
|
主权项 |
1. A method for forming a fluid sensor test strip, the method comprising:
depositing a first dielectric material; etching a plurality of apertures in the first dielectric material; depositing a first metal layer on the first dielectric material and in the apertures to form a first and a second electrode and contact pads in the apertures; depositing a second metal layer in contact with the first metal layer, the second metal layer being of a material that has a resistance generally proportional to temperature; etching the second metal layer to define a temperature sensing resistor of the second metal layer; depositing a second dielectric material in the apertures adjacent the first and second metal layers; and depositing an enzyme on the first and second electrodes and extending from the first electrode to the second electrode, the enzyme configured to pass a sensor current between the first and the second electrodes indicative of a concentration of a test chemical in a test fluid when the test fluid is placed on the enzyme. |
地址 |
Singapore SG |