CAPACITIVE MICROMECHANICAL ACCELERATION SENSOR

摘要

The invention relates to a capacitive micromechanical acceleration sensor comprising a first sensor, a second sensor, and a third sensor. The first sensor comprises a rotor electrode and stator electrode. The sensor comprises a first beam that is connected to a rotor electrode support structure and that is connected to the rotor electrode. The sensor comprises a second beam that is connected to the rotor electrode support structure and that is connected to the rotor electrode. The second sensor is situated in a first space circumscribed by the first beam, the first sensor, and the rotor electrode support structure. The third sensor is situated in a second space circumscribed by the second beam, the first sensor, and the rotor electrode support structure.

主权项

1. A capacitive micromechanical acceleration sensor, comprising:
a substrate, a first sensor configured to measure acceleration along a z-axis perpendicular to a plane of the substrate; a second sensor configured to measure acceleration along an x-axis or y-axis or x- and y-axis parallel to the plane of the substrate; and a third sensor configured to measure acceleration along an y-axis or x-axis or x- and y-axis parallel to the plane of the substrate and perpendicular to the x-axis, wherein the first sensor comprises a rotor electrode and stator electrode, and wherein the rotor electrode is movably anchored to the substrate at a rotor anchoring point, said capacitive micromechanical acceleration sensor further comprising: a first beam having a first end connected at a first connection point by a first spring structure to a rotor electrode support structure that is anchored to the substrate and a second end that is connected at a second connection point to the rotor electrode of the first sensor; a second beam having a first end connected at a third connection point by a second spring structure to the rotor electrode support structure that is anchored to the substrate and a second end that is connected at a fourth connection point to the rotor electrode of the first sensor, wherein the first beam and the second beam are parallel with a central axis of the acceleration sensor, the second sensor is situated in a first space circumscribed by the first beam, the first sensor, the rotor electrode support structure, and the central axis of the acceleration sensor, and wherein the third sensor is situated in a second space circumscribed by the second beam, the first sensor, the rotor electrode support structure, and the central axis of the acceleration sensor.