| 发明名称 |
ION BEAM MEASURING DEVICE AND METHOD OF MEASURING ION BEAM |
| 摘要 |
An ion beam measuring device includes: a mask that is used for shaping an original ion beam into a measuring ion beam including a y beam part elongated in a y direction that is perpendicular to a traveling direction of the ion beam and an x beam part elongated in an x direction that is perpendicular to the traveling direction and the y direction; a detection unit that is configured to detect an x-direction position of the y beam part and a y-direction position of the x beam part; and a beam angle calculating unit that is configured to calculate an x-direction beam angle using the x-direction position and a y-direction beam angle using the y-direction position. |
| 申请公布号 |
US2015001418(A1) |
申请公布日期 |
2015.01.01 |
| 申请号 |
US201414314448 |
申请日期 |
2014.06.25 |
| 申请人 |
SEN Corporation |
发明人 |
Ido Noriyasu;Inada Kouji;Watanabe Kazuhiro |
| 分类号 |
H01J37/304;H01J37/317 |
主分类号 |
H01J37/304 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An ion beam measuring device comprising:
a mask that is used for shaping an original ion beam into a measuring ion beam comprising a y beam part elongated in a y direction that is perpendicular to an ion beam traveling direction and an x beam part elongated in an x direction that is perpendicular to the traveling direction and the y direction; a detection unit that is configured to detect an x-direction position of the y beam part and a y-direction position of the x beam part; and a beam angle calculating unit that is configured to calculate an x-direction beam angle using the x-direction position and a y-direction beam angle using the y-direction position. |
| 地址 |
Tokyo JP |
