| 摘要 |
一种分别于一工件之第一主要表面、及于该第一主要表面相反侧之第二主要表面上制造电镀膜的方法，包括：准备一周期性反向电源以及一直流电源；由该周期性反向电源，于电镀溶液中，于该工件与面对该工件之第一主要表面的第一电极之间，提供定时、反向周期性变换电流方向之电流；以及；由该直流电源，于电镀溶液中，于该工件与面对该工件之第二主要表面的第二电极之间，提供直流电流；同时进行由该周期性反向电源提供之电流以及由该直流电源提供之直流电流，以分别于该第一主要表面与该第二主要表面形成电镀膜。; providing a current whose current direction periodically changes in reverse directions at predetermined timing by a periodic reverse current power source between the workpiece and a first electrode that faces the first main surface of the workpiece in plating solution; and providing a direct current by a direct current power source between the workpiece and a second electrode that faces the second main surface of the workpiece in the plating solution, the providing the current by the periodic reverse current power source and the providing the direct current by the direct current power source being performed at the same time such that plating films are formed on the first main surface and the second main surface, respectively. |
