发明名称 Methods of Forming Conductive Materials on Contact Pads
摘要 Methods of forming conductive materials on contact pads for semiconductor devices and packages. Substrate is provided with contact pads formed thereon. Conductive material is formed over the contact pads by a depositing process followed by a heating process to alter the chemical properties of the conductive material. Optionally, a dispersing process may be incorporated. An interconnect structure can be mounted over the conductive material where the interconnect structure is attached to the conductive material without any active treatment to the conductive material after formation.
申请公布号 US2015004750(A1) 申请公布日期 2015.01.01
申请号 US201313929767 申请日期 2013.06.27
申请人 STATS ChipPAC, Ltd. 发明人 Chi HeeJo;Shin HanGil;Cho NamJu;Kim KyungMoon
分类号 H01L23/00;H01L25/00 主分类号 H01L23/00
代理机构 代理人
主权项 1. A method comprising: (a) providing a substrate having an upper surface and a lower surface, the lower surface opposite the upper surface; (b) forming a contact pad over the upper surface of the substrate; (c) forming a conductive material over the contact pad including: (i) depositing the conductive material;(ii) dispersing the conductive material from an initial area to a final area, the final area greater than the initial area;(iii) heating the conductive material; and (d) mounting an interconnect structure over the conductive material, wherein the interconnect structure is attached to the conductive material without any active treatment to the conductive material after the forming step (c).
地址 Singapore SG