发明名称 SHOWER HEAD FOR ELECTRONIC DEVICE HAVING DISPERSION PINS FABRICATION, AND SHOWER HEAD ASSEMBLY
摘要 <p>A shower head is provided. The shower head, according to one exemplary embodiment of the present invention, comprises: a body provided with one side having a plurality of spray holes penetrated therethrough, and the other side facing the one side; and a plurality of first dispersion pins protruding from the plurality of spray holes of the one side to the other side such that end portions thereof support the other side, and having first gas inlet holes on one side thereof and provided with first passages connected to the first gas inlet holes therein, wherein gas introduced between the one side and the other side is immediately discharged to the outside of the body through the plurality of spray holes by passing the first gas inlet holes and the first passages.</p>
申请公布号 WO2014209017(A1) 申请公布日期 2014.12.31
申请号 WO2014KR05644 申请日期 2014.06.25
申请人 KOREA INSTITUTE OF INDUSTRIAL TECHNOLOGY 发明人 BYUN, CHUL SOO;CHUNG, IL YONG
分类号 H01L21/02 主分类号 H01L21/02
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