| 发明名称 |
ATOMIC BEAM TO PROTECT A RETICLE |
| 摘要 |
Embodiments of the invention provide a beam generator to produce an atomic beam that travels across a patterned surface of a reticle. The beam may interact with particles to prevent the particles from contaminating the reticle. |
| 申请公布号 |
EP1741321(B1) |
申请公布日期 |
2014.12.31 |
| 申请号 |
EP20050733342 |
申请日期 |
2005.04.08 |
| 申请人 |
INTEL CORPORATION |
发明人 |
SILVERMAN, PETER |
| 分类号 |
H05H3/02;G03F7/20;H01L21/306 |
主分类号 |
H05H3/02 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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