发明名称 METHOD FOR PRODUCING INDIUM ALKOXIDE COMPOUNDS, INDIUM ALKOXIDE COMPOUNDS PRODUCIBLE ACCORDING TO SAID METHOD AND THE USE THEREOF
摘要 The present invention relates to indium alkoxide compounds which can be produced by reacting indium trihalide InX3, wherein X = F, Cl, Br, I, with a secondary amine of formula R'2NH, wherein R' = alkyl, in a molar ratio of 8:1 to 20:1 relative to the indium trihalide in the presence of an alcohol of the generic formula ROH, wherein R = alkyl. The invention further relates to a method for producing said compounds and to the use thereof for producing indium oxide-containing or (semi-)conducting layers.
申请公布号 WO2014206634(A1) 申请公布日期 2014.12.31
申请号 WO2014EP59957 申请日期 2014.05.15
申请人 EVONIK INDUSTRIES AG;STEIGER, JÜRGEN;PHAM, DUY VU;NEUMANN, ANITA;MERKULOV, ALEXEY;HOPPE, ARNE;FRÜHLING, DENNIS 发明人 STEIGER, JÜRGEN;PHAM, DUY VU;NEUMANN, ANITA;MERKULOV, ALEXEY;HOPPE, ARNE;FRÜHLING, DENNIS
分类号 C07F5/00;C23C18/12;H01L21/285 主分类号 C07F5/00
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