发明名称 |
LATERALLY DRIVEN PROBES FOR SEMICONDUCTOR TESTING |
摘要 |
A method for testing a semiconductor device. The method comprises moving a probe in a vertical direction towards an electrical structure on a semiconductor device to position the probe alongside the electrical structure. A tip of the probe is positioned lower than an elevation of an outermost periphery of the electrical structure. The method also includes moving the probe in a lateral direction towards the electrical structure to contact the electrical structure. The probe tip mechanically and electrically engages the electrical structure. |
申请公布号 |
KR20140148387(A) |
申请公布日期 |
2014.12.31 |
申请号 |
KR20147026485 |
申请日期 |
2013.03.22 |
申请人 |
ADVANTEST CORPORATION |
发明人 |
NAMBURI LAKSHMIKANTH;CROS FLORENT;DESTA YOHANNES |
分类号 |
H01L21/66;G01R1/067;G01R31/26 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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