Tilt-imaging scanning electron microscope

摘要

One embodiment relates to a tilt-imaging scanning electron microscope apparatus. The apparatus includes an electron gun, first and second deflectors, an objective electron lens, and a secondary electron detector. The first deflector deflects the electron beam away from the optical axis, and the second deflector deflects the electron beam back towards the optical axis. The objective lens focuses the electron beam onto a spot on a surface of a target substrate, wherein the electron beam lands on the surface at a tilt angle. Another embodiment relates to a method of imaging a surface of a target substrate using an electron beam with a trajectory tilted relative to a substrate surface. Other embodiments and features are also disclosed.

主权项

1. A tilt-imaging scanning electron microscope apparatus, the apparatus comprising:
an electron gun for generating an electron beam along an optical axis of an electron beam column, wherein the electron beam includes a source-energy dispersion; a first deflector for deflecting the electron beam away from the optical axis; a second deflector for deflecting the electron beam back towards the optical axis, wherein the second deflector is configured such that a crossover of slow and fast electrons in the electron beam is formed at a position off the optical axis between the second deflector and the objective lens; an objective electron lens configured to image the crossover onto a spot displaced from the optical axis on a surface of a target substrate so as to generate secondary electrons, wherein the electron beam lands on the surface at a tilt angle; and a detector for detecting the secondary electrons.