| 摘要 |
Provided are a shielding unit which collects particles which are diffused to the outside of a substrate in a deposition process for the substrate and a deposition apparatus including the same. The shielding unit of a deposition apparatus, which has a chamber and a source part which provides an organic material toward a substrate received in the chamber, includes a shielding plate which has a passing region which is arranged between the substrate and the source part and allows an organic material deposited on the substrate to pass through, and a blocking region which is prepared near the passing region and blocks the organic material; and an organic material receiving part which is arranged on a surface of the blocking region and receives the organic material blocked by the blocking region. Thereby, the present invention is to collect the organic material diffused to the outside of the substrate and to prevent the generation of the contamination of the substrate due to particles. |
