发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
摘要 A semiconductor device and a method for manufacturing the same are disclosed, which include a gate electrode material in a recess or a buried gate cell structure, a polysilicon material doped with impurities over a sidewall of a recess located over the gate electrode material, and a junction formed by an annealing or a rapid thermal annealing (RTA) process, thereby establishing a degree overlap between a gate electrode material of a buried gate and a junction.
申请公布号 US2014374822(A1) 申请公布日期 2014.12.25
申请号 US201414477739 申请日期 2014.09.04
申请人 SK HYNIX INC. 发明人 LEE Sang Kee;KIM Jong Hwan
分类号 H01L29/10;H01L29/66;H01L21/225;H01L29/423 主分类号 H01L29/10
代理机构 代理人
主权项
地址 Icheon KR