MOLD FOR IMPRINTING, SUBSTRATE FOR MAKING PATTERNED MEDIUM AND PATTERNED MEDIUM, AND METHOD FOR MANUFACTURING THESE

摘要

PROBLEM TO BE SOLVED: To solve such a new problem that, when manufacturing a mold for imprinting by forming a silicon-containing patterning film on a glass substrate containing an alkali metal, the alkali metal precipitates on a surface of a concave-convex pattern.SOLUTION: A method for manufacturing a mold for imprinting includes: a first step of successively forming a patterning film 3, a hard mask film 4 and a resist film 5 on a glass substrate 1 containing an alkali metal, and then forming a resist pattern 5a; and a second step of etching the hard mask film 4 and the patterning film 3 by using the resist pattern 5a so as to form a concavo-convex pattern on the surface of the patterning film 3. In the first step, a precipitation suppressing film 2 is formed between the glass substrate 1 and the patterning film 3 so as to prevent the alkali metal included in the glass substrate 1 from diffusing from the glass substrate 1 to the patterning film 3 to precipitate on the surface of the patterning film 3.