YAW RATE SENSOR HAVING THREE SENSITIVE AXES AND METHOD FOR MANUFACTURING A YAW RATE SENSOR

摘要

A yaw rate sensor includes: a first sensor structure having a first oscillating mass and configured to detect a first yaw rate around a first axis of rotation; a second sensor structure having a second oscillating mass and configured to detect second and third yaw rates around second and third axes of rotation, respectively; and a drive structure coupled to the first and second oscillating masses. The first oscillating mass is drivable into a first drive oscillation along a first oscillation direction, and the second oscillating mass is drivable into a second drive oscillation along a second oscillation direction different from the first oscillation direction. The first axis of rotation is perpendicular to the first oscillation direction, and the second and third axes of rotation are perpendicular to the second oscillation direction.

主权项

1. A yaw rate sensor for detecting a rotational movement, comprising:
a first sensor structure having a first oscillating mass and configured to detect a first yaw rate around a first axis of rotation; a second sensor structure having a second oscillating mass and configured to detect a second yaw rate around a second axis of rotation and a third yaw rate around a third axis of rotation different from the second axis of rotation; and a drive structure coupled to the first and second oscillating masses; wherein the first oscillating mass is drivable into a first drive oscillation along a first oscillation direction, the second oscillating mass is drivable into a second drive oscillation along a second oscillation direction different from the first oscillation direction, the first axis of rotation is perpendicular to the first oscillation direction, and the second and third axes of rotation are perpendicular to the second oscillation direction.