| 发明名称 |
Detector and Charged Particle Beam Instrument |
| 摘要 |
A detector (100) is used to detect a charged particle beam (EB), and includes a first light emission portion (10) for converting the charged particle beam into light, a second light emission portion (20) for converting the charged particle beam transmitted through the first light emission portion (10) into light, and a light detector (30) for detecting the light produced by the first light emission portion (10) and the light produced by the second light emission portion (20). The first light emission portion (10) is a powdered scintillator. The second light emission portion (20) is a single crystal scintillator. |
| 申请公布号 |
US2014374594(A1) |
申请公布日期 |
2014.12.25 |
| 申请号 |
US201414307551 |
申请日期 |
2014.06.18 |
| 申请人 |
JEOL Ltd. |
发明人 |
Kaneko Takeshi |
| 分类号 |
G01T1/20 |
主分类号 |
G01T1/20 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A detector for detecting a charged particle beam, said detector comprising:
a first light emission portion for converting the charged particle beam into light; a second light emission portion for converting the charged particle beam transmitted through the first light emission portion into light; and a light detector for detecting the light produced by the first light emission portion and the light produced by the second light emission portion, wherein said first light emission portion is a powdered scintillator and said second light emission portion is a single crystal scintillator. |
| 地址 |
Tokyo JP |
