| 发明名称 |
RADIATION DETECTION APPARATUS AND METHOD OF MANUFACTURING THE SAME |
| 摘要 |
A method of manufacturing a radiation detection apparatus, includes a bonding step of bonding, on a support substrate, a sensor substrate including a photoelectric converter in which a plurality of photoelectric conversion elements are arranged, by using a bonding layer including a passage which exhausts a gas between the support substrate and the sensor substrate, and a formation step of forming a scintillator layer on the photoelectric converter after the bonding step. The bonding layer has a heat resistance by which bonding between the support substrate and the sensor substrate by the bonding layer is maintained in the formation step. |
| 申请公布号 |
US2014374608(A1) |
申请公布日期 |
2014.12.25 |
| 申请号 |
US201414305283 |
申请日期 |
2014.06.16 |
| 申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
Sasaki Yoshito;Okada Satoshi;Saruta Shoshiro;Nagano Kazumi;Ishida Yohei |
| 分类号 |
H01L31/18;H01L27/146;H01L31/0232 |
主分类号 |
H01L31/18 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method of manufacturing a radiation detection apparatus, the method comprising:
a bonding step of bonding, on a support substrate, a sensor substrate including a photoelectric converter in which a plurality of photoelectric conversion elements are arranged, by using a bonding layer including a passage which exhausts a gas between the support substrate and the sensor substrate; and a formation step of forming a scintillator layer on the photoelectric converter after the bonding step, wherein the bonding layer has a heat resistance by which bonding between the support substrate and the sensor substrate by the bonding layer is maintained in the formation step. |
| 地址 |
Tokyo JP |
