发明名称 |
PROCESS FOR PRODUCING ORGANIC ELECTROLUMINESCENT ELEMENT, AND ORGANIC ELECTROLUMINESCENT DISPLAY DEVICE |
摘要 |
The present invention provides a process for producing an organic EL element and an organic EL display device, the process rendering a reduction in film formation time possible while inhibiting the width of a blurred portion from increasing. This process for producing an organic EL element employs a scanning vapor deposition method. In the process, a plurality of ejection orifices is provided to each vapor deposition source so that the ejection orifices respectively face the openings of a restriction plate, the multiple ejection orifices which face each opening being spaced from each other so that the sum of distributions represented by expression (1) is 1 or less. [Numeral formula 1] cos(ni+3)&thetas;i×ri/Ri (1) Ri represents the maximum film formation rate of an ejection orifice i of the multiple ejection orifices that face each opening; i represents an integer of 1 to m; m represents the number of the multiple ejection orifices that face the opening; ri represents the actual film formation rate of the ejection orifice i in a vapor deposition step; ni is the value of n (0 or a larger number) of the ejection orifice i; and &thetas;i represents the angle between the main film-formation direction and the line segment which connects the ejection orifice i and any point within the film formation region. |
申请公布号 |
WO2014203632(A1) |
申请公布日期 |
2014.12.24 |
申请号 |
WO2014JP62081 |
申请日期 |
2014.05.01 |
申请人 |
SHARP KABUSHIKI KAISHA;CANON TOKKI CORPORATION |
发明人 |
INOUE SATOSHI;KIKUCHI KATSUHIRO;KAWATO SHINICHI;OCHI TAKASHI;KOBAYASHI YUHKI;ICHIHARA MASAHIRO;MATSUMOTO EIICHI |
分类号 |
C23C14/24;H01L51/50;H05B33/10 |
主分类号 |
C23C14/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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