发明名称 |
HYPERBARIC METHODS AND SYSTEMS FOR SURFACE TREATMENT, CLEANING, AND DRYING: THIN LIQUID H-CNX |
摘要 |
<p>Objects with complex surface profiles can be cleaned effectively using hyperbaric pressures. A high temperature high pressure liquid or vapor can be introduced to a sealed chamber containing an object to be cleaned, forming a thin liquid layer on the object. The pressure in the sealed chamber can be quickly reduced, evaporating the thin liquid layer, which can remove surface contaminants from the object. The process can be repeated until the object is cleaned.</p> |
申请公布号 |
WO2014205143(A1) |
申请公布日期 |
2014.12.24 |
申请号 |
WO2014US43049 |
申请日期 |
2014.06.18 |
申请人 |
ADVANCED WET TECHNOLOGIES GMBH;PLAVIDAL, RICHARD W. |
发明人 |
PLAVIDAL, RICHARD W. |
分类号 |
B08B3/04;B08B3/10;B08B7/04;H01L21/302;H01L21/304 |
主分类号 |
B08B3/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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