发明名称 電子線ホログラム形成装置及び電子線ホログラム形成方法
摘要 <p><P>PROBLEM TO BE SOLVED: To provide an electron beam hologram forming device capable of coping with a screening phenomenon and an electron beam hologram forming method. <P>SOLUTION: The electron beam hologram forming device is provided with a first electrode and a second electrode for impressing voltage on a sample. In the electron beam hologram forming method, electron beams are irradiated on the sample in a state the voltage is impressed on the sample to form the electron beam hologram. <P>COPYRIGHT: (C)2011,JPO&INPIT</p>
申请公布号 JP5644119(B2) 申请公布日期 2014.12.24
申请号 JP20100013864 申请日期 2010.01.26
申请人 发明人
分类号 H01J37/295;H01J37/22;H01J37/26 主分类号 H01J37/295
代理机构 代理人
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