HANDLING ZIG OF CATHODE ELECTRIC PLATE

摘要

Disclosed is a handling jig of an electrode plate. The handling jig of an electrode plate according to an embodiment of the present invention includes a handling jig which faces a surface of the cathode electrode plate to allow a worker to selectively mount the cathode electrode plate on the inner upper part of a plasma chamber; and a fixing member which is installed at the cathode electrode plate via the handling jig.