FLAW DETECTING DEVICE OF SPECIMEN

摘要

The present invention relates to a defect detecting device for a specimen. The defect detecting device for a specimen is to solve the existing problems of high cost and low efficiency due to establishment of multiple electron microscopes and placement of multiple workers, and of only limited small number of specimen to be measured through one facility. Thus, in the present invention, a first and a second sub chamber are connected with a main chamber in a vacuum state mounted with an electron microscope so that a sample holder can be automatically transferred and measured. Therefore, the defect detecting device can continuously observe defects or measure microstructures on specimens in a constant vacuum state through only one electron microscope, thereby improving efficiency compared with the costs.