发明名称 FIXING APPARATUS FOR SUBSTRATE AND APPARATUS FOR INSPECTING SUBSTRATE HAVING THE SAME
摘要 <p>Disclosed are a substrate fixing device and a substrate inspection device including the same. The substrate fixing device according to an embodiment of the present invention comprises a stage on which a substrate having solder is arranged; an earthing plate which is arranged on the top of the substrate and has a hole; and an earthing plate holder which is coupled to the stage and the earthing plate and touches the earthing plate to the solder to observe the solder through the hole.</p>
申请公布号 KR20140145022(A) 申请公布日期 2014.12.22
申请号 KR20130067391 申请日期 2013.06.12
申请人 SAMSUNG ELECTRO-MECHANICS CO., LTD. 发明人 CHUNG, HEE SUK;KIM, GYU SEOK;PARK, SE YOON;LEE, KYUNG HO;KANG, HAN WOOL;HAM, SUK JIN
分类号 G01N23/227;H01L21/683 主分类号 G01N23/227
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