| 摘要 |
<p>PROBLEM TO BE SOLVED: To reduce an error included in a movement quantity correction value as to a probe.SOLUTION: The fitting position of a probe 6 is so defined that when an inspection head 4 fitted with a camera 5 and a probe 6 is moved by placing only a Y-axial driving shaft of an X-Y moving mechanism 3a in operation, a linear movement track TR2 of a probe tip part 6a is included in a belt-like movement track TR1 as to an imaging area RE of the camera 5. In correction value measurement processing, a processing part 7 performs a dent forming operation to form a dent S with the probe tip part 6a at a predetermined position on a dent sheet 21 while moving an inspection head 4 by placing only the Y-axial driving shaft in operation, and a measuring operation to measure a quantity of deviation of the dent S from the predetermined position P by performing image analytic processing on image data D1 from the camera 5 when the inspection head 4 is further moved from the execution position of the dent forming operation so as to put the dent S in the imaging area RE and to store the quantity of deviation as a movement quantity correction value.</p> |
