MICROMECHANICAL MOISTURE SENSOR DEVICE, CORRESPONDING MANUFACTURING METHOD, AND MICROMECHANICAL SENSOR SYSTEM

摘要

A micromechanical moisture sensor device includes: a substrate having a front side and a rear side; an interdigital printed conductor track arrangement provided above and/or below the front side of the substrate; and a moisture-sensitive polymer layer situated above and in the gaps of the interdigital printed conductor track arrangement. The moisture-sensitive polymer layer extends below the front side into the substrate.

主权项

1. A micromechanical moisture sensor device, comprising:
a substrate having a front side and a rear side; an interdigital printed conductor track arrangement provided at least one of above and below the front side of the substrate; and a moisture-sensitive polymer layer situated (i) above the interdigital printed conductor track arrangement and (ii) in gaps of the interdigital printed conductor track arrangement; wherein the moisture-sensitive polymer layer extends into the substrate below the front side.