发明名称 LIGHT MEASURING METHOD OF LIGHT MEASURING APPARATUS
摘要 <p>PROBLEM TO BE SOLVED: To provide a light measuring apparatus capable of exactly measuring the light amount of measuring object light.SOLUTION: A spectrum measuring apparatus 1 comprises: a wavelength variable interference filter 5; a detection part 32; and a control device 4. The wavelength variable interference filter 5 comprises: a first substrate to which a first reflection film is provided; a second substrate that comprises a movable part and a holding part and in which a second reflection film facing the first reflection film via a gap is provided to the movable part; and an electrostatic actuator varying the gap. The detection part 32 comprises a plurality of detection elements 321. The control device 4 comprises: a drive control part 422 for outputting an input value to the electrostatic actuator; a storage part 41 for storing correlation data recorded with wavelength of received light in the detection element 321 in relation to the input value; an element identification part 421 for identifying the detection element 321 capable of receiving the measuring object light on the basis of the correlation data; and a light amount acquisition part 423 for acquiring the light amount of the measuring object light detected by the identified detection element 321.</p>
申请公布号 JP2014238611(A) 申请公布日期 2014.12.18
申请号 JP20140171260 申请日期 2014.08.26
申请人 SEIKO EPSON CORP 发明人 URUSHIYA TANIO
分类号 G02B26/00;B81B3/00;G01J3/26;G01J3/50 主分类号 G02B26/00
代理机构 代理人
主权项
地址
您可能感兴趣的专利