ORGANIC LAYER DEPOSITION APPARATUS AND METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY DEVICE BY USING THE ORGANIC LAYER DEPOSITION APPARATUS

摘要

An organic layer deposition apparatus includes: a conveyer unit including a transfer unit, a first conveyer unit, and a second conveyer unit; a loading unit for fixing a substrate to the transfer unit; a deposition unit including a chamber and at least one organic layer deposition assembly; and a measuring unit located between the loading unit and the deposition unit to measure position information of the substrate before an organic layer is deposited onto the substrate; and an unloading unit for separating, from the transfer unit, the substrate onto which the deposition has been completed, wherein the transfer unit is configured to cyclically move between the first conveyer unit and the second conveyer unit, and wherein the substrate fixed to the transfer unit is configured to be spaced apart from the at least one organic layer deposition assembly while being transferred by the first conveyer unit.

主权项

1. A method of manufacturing an organic light-emitting display device by using an organic layer deposition apparatus for forming an organic layer on a substrate, the method comprising:
fixing the substrate to a transfer unit by using a loading unit; transporting, into a chamber, the transfer unit onto which the substrate is fixed, by using a first conveyer unit passing through the chamber; measuring position information of the substrate before the organic layer is formed on the substrate; forming the organic layer by depositing a deposition material discharged from an organic layer deposition assembly, onto the substrate while the substrate is moved relative to the organic layer deposition assembly, wherein the organic layer deposition assembly in the chamber is spaced apart from the substrate; separating the substrate, onto which the forming of the organic layer has been completed, from the transfer unit by using an unloading unit; and transporting the transfer unit, from which the substrate has been separated, to the loading unit by using a second conveyer unit passing through the chamber.