发明名称 METHOD FOR DISSOLVING CHALCOGEN ELEMENTS AND METAL CHALCOGENIDES IN NON-HAZARDOUS SOLVENTS
摘要 The present disclosure provides a method of preparing a chalcogen containing solution that is hydrazine free and hydrazinium free, wherein the method comprises: providing a predetermined amount of elemental chalcogen; providing a predetermined amount of elemental sulfur; providing an amine solvent; and combining the predetermined amount of elemental chalcogen and the predetermined amount of elemental sulfur in the amine solvent, thereby dissolving the elemental chalcogen and the elemental sulfur in the amine solvent. The chalcogen containing solution can advantageously be used as a precursor for the formation of a chalcogen containing layer on a substrate.
申请公布号 WO2014198497(A1) 申请公布日期 2014.12.18
申请号 WO2014EP60232 申请日期 2014.05.19
申请人 IMEC VZW;KATHOLIEKE UNIVERSITEIT LEUVEN, KU LEUVEN R&D 发明人 ESMAEIL ZAGHI, ARMIN;VLEUGELS, JOZEF PETRUS COLETA
分类号 C01B19/00;C01G3/00;C01G15/00;H01L21/02 主分类号 C01B19/00
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