发明名称 封止材付きテンプレート、テンプレートの保管方法及びテンプレート開封装置
摘要 <p>A sealant-attached template includes a template, a sealing substrate, and a sealing resin. The template has a major surface and a pattern including at least one of a depression and a protrusion provided on the major surface. The sealing substrate is provided opposite to the pattern of the template. The sealing resin is provided between the major surface and the sealing substrate.</p>
申请公布号 JP5642726(B2) 申请公布日期 2014.12.17
申请号 JP20120037072 申请日期 2012.02.23
申请人 发明人
分类号 H01L21/027;B29C33/56;B29C33/70;B29C59/02 主分类号 H01L21/027
代理机构 代理人
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