| 发明名称 |
LOW DIELECTRIC PHOTOIMAGEABLE COMPOSITIONS AND ELECTRONIC DEVICES MADE THEREFROM |
| 摘要 |
<p>This invention relates generally to silicon based photoresist compositions that can be used in forming low k dielectric constant materials suitable for use in electronic devices, methods of their use and the electronic devices made therefrom.</p> |
| 申请公布号 |
EP2812399(A1) |
申请公布日期 |
2014.12.17 |
| 申请号 |
EP20130711124 |
申请日期 |
2013.02.08 |
| 申请人 |
AZ ELECTRONIC MATERIALS (LUXEMBOURG) S.À.R.L. |
发明人 |
ZHANG, RUZHI;KIM, JIHOON;PATEL, BHARATKUMAR, K.;WOLFER, ELIZABETH |
| 分类号 |
C08L83/04;G03F7/075;H01L21/02;H01L21/312 |
主分类号 |
C08L83/04 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
