发明名称 半導体装置
摘要 <p>A semiconductor device includes: a main body chip; a circuit pattern on a front surface of the main body chip and including a first pad; a cap chip including a first recess in a front surface of the cap chip and a second recess in a back surface of the cap chip, the cap chip being joined to the main body chip with the first recess facing the circuit pattern; a second pad on a bottom surface of the first recess of the cap chip; a first metallic member inlaid in the second recess of the cap chip; a first through electrode electrically connecting the second pad to the first metallic member through the cap chip; and a bump electrically connecting the first pad to the second pad.</p>
申请公布号 JP5640892(B2) 申请公布日期 2014.12.17
申请号 JP20110114933 申请日期 2011.05.23
申请人 发明人
分类号 H01L23/02;H01L25/065;H01L25/07;H01L25/18 主分类号 H01L23/02
代理机构 代理人
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