| 摘要 |
PROBLEM TO BE SOLVED: To provide a thermoelectric thin film element having a sufficiently-thinned supporting substrate. SOLUTION: In a manufacturing process of either thermoelectric thin film element in a thermoelectric module in which a P-type and a N-type thermoelectric thin film elements are alternatively connected thereto, when an intermediary body 20 for manufacturing the thermoelectric thin film element slides relative to a processing surface F2 of a surface plate for grinding to execute a grinding process for grinding and thinning a supporting substrate 21 in a state that thin films 22(22a) and 23 configuring the thermoelectric thin film element holds the intermediary body 20 formed on the supporting substrate 21 for manufacturing the thermoelectric thin film element by a holder 4, grinding amount detection members 5 and 5 having a grinding amount detection conductor whose resistance value changes by being ground with the supporting substrate 21 are provided on the holder 4, a measurement processing for measuring the resistance value of the grinding amount detection conductor is executed, the intermediary body 20 and the grinding members 5 and 5 are ground in a grinding process, and the grinding process is finished when a predetermined resistance value is measured in the measurement processing. COPYRIGHT: (C)2012,JPO&INPIT |
