Substrate support bushing

摘要

A bushing assembly for supporting a substrate within a processing chamber is generally provided. In one aspect, the bushing assembly comprises a tubular body having an outer perimeter and an aperture extending therethrough, a first ring having a first inner edge, the first ring disposed in the aperture in an upper portion of the tubular body, and a second ring having a second inner edge, the second ring disposed in the aperture in a lower portion of the tubular body. In another aspect, the first inner edge has a first radius of curvature, and the second inner edge has a second radius of curvature. In another aspect, a first inner edge diameter, a second inner edge diameter, the first radius of curvature, and the second radius of curvature are selected such that a support pin extending through the aperture contacts the bushing assembly on at most two points.

主权项

1. A bushing assembly, comprising:
a tubular body having an outer perimeter and an aperture extending therethrough; a first ring having a first inner edge, the first ring being disposed in the aperture in an upper portion of the tubular body; a second ring having a second inner edge, the second ring being disposed in the aperture in a lower portion of the tubular body; wherein the first inner edge has a first radius of curvature, and the second inner edge has a second radius of curvature; and one or more alignment pins extending through the tubular body, the one or more alignment pins coupled to the first ring and the second ring.