Electronic device, electronic apparatus, and method of manufacturing electronic device

摘要

An electronic device includes: a vibrator disposed within a cavity on a substrate and electrically driven; an enclosure wall which has electric conductivity and sections the cavity from an insulation layer surrounding the circumference of the cavity; a first wiring and a second wiring which connect with the vibrator and penetrate the enclosure wall; and a liquid flow preventing portion disposed at the position where the first wiring and the second wiring penetrate the enclosure wall to prevent flow of etchant dissolving the insulation layer from the cavity toward the insulation layer and insulate the first wiring and the second wiring from the enclosure wall.

主权项

1. An electronic device comprising:
a function element disposed within a cavity on a substrate and electrically driven; a covering portion which has electric conductivity and sections the cavity from an interlayer insulation film surrounding the circumference of the cavity; a wiring which connects with the function element and penetrates the covering portion; and a liquid flow preventing portion disposed at the position where the wiring penetrates the covering portion to prevent flow of etchant dissolving the interlayer insulation film from the cavity toward the interlayer insulation film and insulate the wiring from the covering portion, wherein the liquid flow preventing portion has a side wall extension which projects from the covering portion toward the interlayer insulation film.