发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device and a manufacturing method of the same, which can prevent oxidization of a Ni-containing electrode to avoid deterioration in wettability with a solder and achieve good electrical contact between a semiconductor substrate and the electrode at low cost.SOLUTION: A semiconductor device 1 according to the present embodiment comprises: a semiconductor substrate 2; and a back electrode 4 formed by sequentially laminating a first metal electrode 41, a second metal electrode 42 and a third metal electrode 43 on the semiconductor substrate 2. The first metal electrode 41 is Ti or a Ti alloy, and the second metal electrode 42 is Ni or a Ni alloy, and the third metal electrode 43 is an alloy of Ag and at least one among Pd, Ni, Cu, Mg, Zn, Nd, Sn and Bi.
申请公布号 JP2014236043(A) 申请公布日期 2014.12.15
申请号 JP20130115355 申请日期 2013.05.31
申请人 MITSUBISHI ELECTRIC CORP 发明人 SUZUKI YUICHIRO;TARUYA MASAYOSHI;TOKURA YUJI
分类号 H01L21/28;C22C5/06;C22C5/08;C22C5/10;H01L21/329;H01L21/52;H01L29/861;H01L29/868 主分类号 H01L21/28
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