| 摘要 |
PROBLEM TO BE SOLVED: To provide a filming apparatus capable of improving the material utilization efficiency of a filming material.SOLUTION: A filming apparatus 1 comprises a diffusion width control part 50 for controlling the diffusion width of filming material particles Mb from an evaporation source 2. The diffusion width control part 50 can make larger the diffusion width in a longitudinal direction D2 perpendicular to a transverse direction D1 than the diffusion width in the transverse direction D1. In short, the diffusion width control part 50 can make the diffusion width shorter in the transverse direction D1 than the diffusion width in the longitudinal direction D2. Therefore, the diffusion width in the transverse direction D1 can be reduced to suppress deposition on the side wall 10i and the side wall 10h of a vacuum chamber 10 facing the transverse direction D1. As a result, the filming material particles Mb to deposit on the wall face of the vacuum chamber 10 can be reduced to improve the material using efficiency of a filming material Ma. |
