发明名称 LASER PULSE FOCUSING
摘要 In certain embodiments, a system (10) comprises a laser source (20), one or more optical elements (24), a monitoring device (28), and a control computer (30). The laser source (20) emits one or more laser pulses. The optical elements (24) change a pulse length of the laser pulses, and the monitoring device (28) measures the pulse length of the laser pulses to detect the change in the pulse length. The control computer (30) receives the measured pulse length from the monitoring device (28), determines one or more laser parameters that compensate for the change in the pulse length, and controls the laser source (20) according to the laser parameters.
申请公布号 US2014361145(A1) 申请公布日期 2014.12.11
申请号 US201214369824 申请日期 2012.11.14
申请人 WAVELIGHT GMBH 发明人 Vogler Klaus;Kittelmann Olaf;Foesel Matthias;Donitzky Christof
分类号 H01S3/00 主分类号 H01S3/00
代理机构 代理人
主权项 1. A system comprising: a laser source configured to emit one or more laser pulses; one or more optical elements that change a pulse length of the one or more laser pulses; a monitoring device configured to measure the pulse length of the one or more laser pulses to detect the change in the pulse length; and a control computer configured to: receive the measured pulse length from the monitoring device;determine one or more laser parameters that compensate for the change in the pulse length; andcontrol the laser source according to the one or more laser parameters.
地址 Erlangen DE