| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic holding device which enables a holding object to be easily removed.SOLUTION: An electrostatic holding device 2 includes: a first electrostatic chuck 21 which is formed so as to deform and attracts a holding object WF by static electricity; a table body 22 which holds the first electrostatic chuck 21 and may form a sealed space between itself and the first electrostatic chuck 21; and contact area reduction means 23 which supplies a fluid to the sealed space to expand the first electrostatic chuck 21 and thereby reduces a contact area between the first electrostatic chuck 21 and the holding object WF. |
