发明名称 MANUFACTURING METHOD OF ELECTRONIC DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a manufacturing method of an electronic device capable of forming an organic thin film in a short time while suppressing damage given to a substrate and a member formed on the substrate, and to provide a manufacturing method of the thin film used for the electronic device.SOLUTION: The electronic device comprises two or more electrodes and an organic thin film provided between the two or more electrodes, and is manufactured on a substrate. The manufacturing method of the electronic device includes the steps of: forming a coating film by applying a coating liquid containing a material including a crosslinking group; and forming the organic thin film by exposing the coating film to hot air of 500°C or higher to crosslink the crosslinking group.
申请公布号 JP2014232632(A) 申请公布日期 2014.12.11
申请号 JP20130112701 申请日期 2013.05.29
申请人 SUMITOMO CHEMICAL CO LTD 发明人 ROKUHARA KOICHI
分类号 H05B33/10;H01L21/336;H01L29/786;H01L51/42;H01L51/50 主分类号 H05B33/10
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