发明名称 |
METHOD AND DEVICE FOR FORMING PROTRUSION BY MASKING ON SURFACE OF BASIC MATERIAL |
摘要 |
The present invention relates to a method and a device for forming a protrusion by masking and, more specifically, to a method for forming a protrusion by masking, comprising: a mask formation step for forming a mask layer on a basic material; an etching step for etching an area in which a mask is not formed on the basic material; and a mask removal step for removing the mask layer, wherein the mask formation step comprises: a step for forming at least one small mask; and a step for forming at least one big mask. |
申请公布号 |
WO2014196694(A1) |
申请公布日期 |
2014.12.11 |
申请号 |
WO2013KR08036 |
申请日期 |
2013.09.05 |
申请人 |
SEP, INC. |
发明人 |
LEE, SANG RO;RHA, JONG JOO;PARK, MYUNG JUM;KIM, MYOUNG GEUN;KIM, YUN HWAN;SEO, JAE HYUNG;YUE, XIN;LEE, JI YOUNG |
分类号 |
C23C14/04;C23C14/34;C23C16/04;C23C16/44 |
主分类号 |
C23C14/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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