| 摘要 |
PROBLEM TO BE SOLVED: To provide an alignment mask which is provided with an alignment mark and a projection but has no adverse effect on mutual formation positions.SOLUTION: A mask base plate having a pattern part formed thereon and including an opening formed into an intended shape is provided with an alignment mark used for positioning with respect to a workpiece, and a projection provided around the opening. The projection is provided at a position where the alignment mark is formed. |
